Bejarano Gaitán G, Echavarría García AM, Quirama Ossa AC, Osorio Vélez JA. DEPOSITION AND PROPERTY CHARACTERISATION OF TaN COATINGS DEPOSITED WITH DIFFERENT NITROGEN CONTENTS. Reveiaeng [Internet]. 2016Oct.25 [cited 2024Nov.26];13(25):69-80. Available from: https://revistabme.eia.edu.co/index.php/Reveiaenglish/article/view/1047